| |
|
| |
 |
Supertex inc.
Registered to ISO 9001
Registered to ISO 16949
ISO/TS 16949:2002 Certified |
| |
|
Process Technology Overview |
| Supertex has processes covering a wide range of operating voltages from
1.5 Volts up to 700 Volts. Most processes are available with double poly
and double metal layers. The following are some standard processes available
for foundry services: |
Process Parameters
Technology |
4.0
Micron
CMOS |
3.0
Micron
CMOS
(*w/LDD) |
2.0
Micron
CMOS
(*w/LDD) |
1.2
Micron
CMOS
(1 poly) |
1.2
Micron
CMOS
(2 poly) |
0.8
Micron
CMOS |
0.8
Micron
CMOS |
| Well
Type |
p-Well |
n-Well
or
p-Well |
n-Well
or
p-Well |
Twin-Well |
Twin-Well |
Twin-Well |
Twin-Well |
| Poly
Layers |
Single/
Double |
Single/
Double |
Single/
Double |
Single |
Double |
Single/
Double |
Single/
Double |
| Poly
Width/Space (µm) |
1st
2nd |
4.0/3.0
4.0/4.0 |
3/0/3.0
3/0/3.0 |
2.0/2.5
2.0/3.0 |
1.2/1.4
---- |
1.2/1.4
1.6/2.2 |
0.8/1.0
0.8/1.0 |
0/6/0.7
0.6/0.7 |
| Metal
Layers |
Single/
Double |
Single/
Double |
Single/
Double |
Single/
Double |
Single/
Double |
Single/
Double/
Triple |
Single/
Double |
| Metal
1 Width/Space (µm) |
4.0/4.0 |
4.0/3.0 |
2.5/2.5 |
2.2/1.2 |
2.2/1.2 |
1.4/1.0 |
0.8/0.8 |
| Metal
2 Width/Space (µm) |
6.0/4.0 |
4.0/4.0 |
3.0/3.0 |
2.0/1.6 |
2.0/1.6 |
1.4/1.0 |
0.8/0.9 |
| Metal
3 Width/Space (µm) |
---- |
---- |
---- |
---- |
---- |
1.4/1.2 |
---- |
| Contact
Width/Space (µm) |
3.0/3.0 |
3.0/3.0 |
2.0/2.0 |
1.2/1.4 |
1.2/1.4 |
0.8/0.8 |
0.6/0.6 |
| Via
1 Width/Space (µm) |
4.0/4.0 |
3.0/3.0 |
2.0/2.5 |
1.2/1.6 |
1.2/1.6 |
0.8/1.0 |
0.6/0.8 |
| Via
2 Width/Space (µm) |
---- |
---- |
---- |
---- |
---- |
0.8/1.0 |
---- |
| Max.
Operating Voltage (V) |
15 |
*12/5.5 |
*20,*10,5.5 |
5.5 |
5.5 |
5.5 |
5.5 |
| Gate
Oxide Thickness (Å) |
580 |
500 |
400 |
225 |
225 |
150/175 |
130 |
| BVDSSN
(Typ.) (V) |
21.5 |
*24/19 |
15 |
16 |
14.5 |
14 |
11 |
| BVDSSP
(Typ.) (V) |
-22 |
*-18/17 |
-15 |
-15 |
-14.5 |
-11 |
-8 |
| *Contact
factory for LDD option |
|
